ProjectsProjectsÌýThe Links Below Highlight Some ofÌýthe Current Research ProjectsÌýin the Group.ÌýÌýÌýAtomic Layer Etching (ALE)Electron-Enhanced ALDSpatial ALD and Roll-to-Roll ALDMolecular Layer Deposition (MLD)Electrochemical Applications of ALDALD and ALE for Micro Electro Mechanical Systems (MEMS)Atomic Layer Etching (ALE)Electron-Enhanced ALDSpatial ALD and Roll-to-Roll ALDMolecular Layer Deposition (MLD) of Organic & Hybrid Organic-Inorganic FilmsElectrochemical Applications of ALDALD & ALE for Micro Electro Mechanical Systems (MEMS)
